Electrostatic Chuck (E-Chuck) Power Supplies

Considerable reduction in tact time and process working time

Looking to reduce chuck and de-chuck times?

1. Thanks to our proprietary high-speed response technology, Matsusada Precision's E-chuck power supplies apply voltage instantly. This ensures fast, smooth chucking with no time delay.

2. When de-chucking, our E-chuck power supplies not only turn off the high voltage but also actively discharge residual voltage on the electrostatic chuck, wafer, or glass substrate.

* This rapid and smooth chucking and de-chucking (releasing) significantly contributes to reducing the overall process time.

Long life and highly reliable design

Frustrated by downtime and maintenance caused by equipment failure?

1. Our ECA series and EJC series utilize solid-state switching for polarity inversion instead of electromechanical relays. This design eliminates issues related to contact wear, ensuring long-term, failure-free operation.
2. RF filter, which is optionally available, protects the power supply from RF noise which can cause a failure or malfunction.

Unique and useful functions for E-chuck application

Matsusada Precision's E-chuck power supplies are designed with various functions, such as two-channel outputs for bipolar E-chucks, high-voltage output with user-defined waveforms, reversible polarity, forced grounding, and an isolation relay to disconnect the E-chuck from the power supply. Our E-chuck power supplies have all the functions required for E-chuck applications. This allows for control logic tailored to the user's specific requirements.

>>Click here to see a list of high-voltage power supplies for electrostatic chucks.