Introducing the HECD Series: Electrostatic Chuck High-Voltage Power Supply with Built-in Wafer Detection
Matsusada Precision has released the HECD series, a new high-voltage power supply designed for electrostatic chuck (E-chuck) applications. In addition to standard polarity reversal and forced discharge functions, the HECD series features a built-in sensor to monitor wafer chucking status.
The series offers output voltages ranging from ±0.5 kV to ±5 kV per channel, supporting both Coulombic and Johnsen-Rahbek electrostatic chucks. A total of six models are available to meet various process requirements.
Equipped with standard digital interfaces (LAN, USB, and RS-232C), the HECD series is ideal for integration into high-precision automatic inspection and measurement systems.
For more information, contact us here.
